Non-Destructive Evaluation

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- Energy Dispersive Spectroscopy -

Chemical analysis in the E-SEM is performed using energy dispersive spectroscopy (EDS). EDS measures the energy and intensity distribution of X-ray signals generated by the electron beam striking the surface of the specimen. The elemental composition at a point, along a line, or in a defined area can be easily determined to a high degree of precision (~0.1 wt.%).

In the failure analysis of electronic products, EDS can be crucial in determining solder composition, examining plating quality, determining the location and source of contamination, and performing reverse engineering.


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