MicroElectroMechanical Systems (MEMS)
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Articles
Embedded 3D BioMEMS for multiplexed label-free detection S. Arvind, R. Doraiswami and M. Pecht, Proceedings of the 61st Electronic Components and Technology Conference, June 1- 3, 2011, Orlando, FL.
Forward-stepwise Regression Analysis for Fine Leak Batch Testing of Multiple MEMS Package, C. Jang, B. Youn, P. F. Wang. B. Han and S.-J. Ham, Microelectronics Reliability, Vol. 18, No. 3, pp. 577-587 (2010).
Biocompatible Polymer Composite Material for Highly Sensitive Point-of-care BioMEMS Microcantilever Sensors, S. Arvind, R. Doraiswami and M. Pecht, Proceedings of the 2010 SMTA International Conference and Exhibition, October 24-28, 2010, Orlando, FL.
Quantitative Characterization of True Leak Rate of Micro to Nanoliter Packages Using a Helium Mass Spectrometer, A. Goswami, B. Han, S.-J. Ham and B.-G. Jeong, IEEE Transactions on Advanced Packaging, Vol. 32, No. 2, pp. 440-447 (2009).
Hermeticity Evaluation of Polymer-Sealed MEMS Packages by Gas Diffusion Analysis, C. Jang, A. Goswami and B. Han, IEEE/ASME Journal of Microelectromechanical Systems, Vol. 18, No. 3, pp. 577-587 (2009).
In-situ Measurement of Gas Diffusion Properties of Polymeric Seals Used in MEMS Packages by Optical Gas Leak Test, C. Jang, A. Goswami, B. Han and S. Ham, Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, No. 4, 043025 (2009).
On Applicability of MIL-Spec-Based Helium Fine Leak Test to Packages with Sub-micro liter Cavity Volumes, A. Goswami and B. Han, Microelectronics Reliability, Vol. 48, pp. 1815–1821 (2008).
On Ultra-Fine Leak Detection of Hermetic Wafer Level Packages, A. Goswami and B. Han, IEEE Transactions on Advanced Packaging, Vol. 31, No. 1, pp. 14-21, 2008.
Reliability Assessment of Delamination in Chip-to-Chip Bonded MEMS Packaging, R. Swaminathan, H. Bhaskaran, P. Sandborn, G. Subramanian, M. Deeds, and K. Cochran, IEEE Transactions on Advanced Packaging, Vol. 26, No. 2, pp. 141-151, May 2003.
Carrier-Level Packaging and Reliability of a MEMS-Based Safety and Arming Device, M. Deeds, K. Cochran, R. Swaminathan, and P. Sandborn, Proceedings MRS Spring Meeting, April 2001.
Packaging of a MEMS Based Safety and Arming Device, M. Deeds, K. Cochran, P. Sandborn and R. Swaminathan, ITHERM 2000 Proceedings, Vol. 1, pp. 107-112, May 2000.
Test and Evaluation of Chip-to-Chip Attachment of MEMS Devices, P. Sandborn, R. Swaminathan, G. Subramanian, M. Deeds, and K. Cochran, ITHERM 2000 Proceedings, Vol. 1, pp. 133-140, May 2000.
Delamination Study of Chip-to-Chip Bonding for a LIGA Based Safety and Arming System, G. Subramanian, M. Deeds, K. Cochran, R. Raghavan, P. Sandborn, Proc. SPIE Symposium on Micromachining and Microfabrication, pp. 112-119, Sept. 1999.