Microelectronics Reliability 48 (2008) 1815–1821

On the applicability of MIL-Spec-based helium fine leak test to packages with sub-micro liter cavity volumes

Arindam Goswami, Bongtae Han
Center for Advanced Life Cycle Engineering (CALCE)
1103 Engineering Lab Building
University of Maryland
College Park, MD 20742


The MIL-Spec-based helium fine leak test (test condition A1 and test condition A2) is reviewed for its applicability to packages with sub-micro liter cavity volumes. The existing gas conduction models are utilized to investigate the validity of the criteria defined in the test guidelines in terms of true leak rates. The application domains valid under the current guidelines are determined as a function of the internal cavity volume. The results show that the test is valid only for a finite domain of true leak rates when the volume is smaller than 10-2 cm3 and the invalid domain increases as the cavity volume decreases.

Complete article available to CALCE consortium members

[Home Page] [Articles Page]
Copyright © 2008 by CALCE and the University of Maryland, All Rights Reserved