MicroElectroMechanical Systems (MEMS)

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Microelectromechanical systems (MEMS) are an important, diverse, and fast growing set of technologies that integrate miniaturized mechanical and electro-mechanical components (i.e., sensors and actuators) made using microfabrication techniques. Demand for MEMS technologies is growing rapidly, and MEMS devices have been introduced into a wide variety of applications. The reliability of MEMS devices, especially those for new applications, is of concern. By understanding the failure modes and underlying mechanisms in MEMS, reliability problems can be addressed by optimizing the design, material selection, fabrication process, and testing methods of MEMS. This area of the CALCE website is intended to document CALCE's efforts in this area.