Optical Methods for Microelectronics

Course Overview
Course Outline
Related Texts


Course Overview

This course teaches the basic concepts of optical methods as applied to microelectronics product development. It reviews numerous applications, which treat a great diversity of mechanics and materials studies in electronic packaging. Practical aspects of the technology are discussed in the final section.


Course Outline

    1. Introduction
    2. Basic concepts 
    3. Geometrical interference 
    4. Optical interference 
    5. Interferometry
    6. Application I: Characterization of thermo-mechanical behavior
    7. Application II: Verification of numerical model
    8. Application III: Determination of effective properties
    9. Instrumentation and practical aspects


Related Links and Texts



Michael Pecht
Bldg. 89, Rm. 1103
University of Maryland
College Park, MD 20742


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