8 th International Conference and Exhibition on Device Packaging

Performance of MEMS Vibratory Gyroscopes in Harsh Environments

Chandradip Patela and Patrick McCluskeyb

a,bCALCE Electronics Products and Systems Consortium
Department of Mechanical Engineering, A. James Clark School of Engineering
University of Maryland, College Park, MD, USA, 20742


Recent advances in Micro-electromechanical systems (MEMS) technology have resulted in relatively low cost MEMS gyroscopes. Their unique features compared to macro-scale devices have made them popular in many applications. Nowadays, MEMS gyroscopes are lighter, smaller and consume less power and therefore, are considered to be the best low-cost solution compared to spinning disk or wheel type mechanical gyroscopes. These low-cost MEMS gyroscopes have opened up a wide variety of applications with environmental conditions ranging from mild to harsh. Many of these harsh environments include high temperature, high humidity, high-G mechanical shock/drop, high-frequency mechanical vibration and high frequency acoustic noise. This paper reviews the studies conducted to understand the effect of such harsh environment on MEMS gyroscopes. It also demonstrates the effects of an elevated temperature and sustained exposure to temperature combined humidity on the MEMS vibratory gyroscope.

Keywords: MEMS gyroscope, inertial sensors, reliability, characterization, harsh environment.

Complete article is available from the publisher and to the CALCE consortium members.

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