Microelectronics Reliability, Vol. 41, No. 12, pp. 2067-2070, December
2001
Bharatwaj Ramakrishnan
Advanced Micro Devices
3625 Peterson Way
Santa Clara, CA 95954
Peter Sandborn and Michael Pecht
CALCE EPSC
University of Maryland
College Park, MD 20742
Abstract:
This paper discusses process capability indices - Cp & Cpk, their underlying assumptions, and the relationships between process capability indices and process yield. An actual case is presented to demonstrate the issues.
Complete article is available to CALCE Consortium Members