Advanced Materials & Processes, pp. 24-25, July 1995.

Environmental Scanning Electron Microscope

M. Li, K. Rogers, and C. Rust


Abstract:

Environmental scanning electron microscopy can be used to identify various interfacial defects in electronic packages.  The traditional scanning electron microscope (SEM), first commercialized in 1965, operates under high-vacuum conditions.  The secondary electron images of a specimen can reach nanometer resolution if the specimen is electrically conductive.  However, when characterizing a poorly conductive specimen, traditional SEMs are affected by surface charging.  To avoid this problem, the specimen must be coated with a conductive film such as carbon.  However, besides altering the surface slightly, this coating can also render the specimen unusable.
 

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