Center for Advanced Life Cycle Engineering

Building 89, Room 1103 
University of Maryland 
College Park, MD 20742 
301-405-5323 
301-314-9269 (fax) 
webmaster@calce.umd.edu

Quanta FEG ESEM 200 SEM

Capabilities

  • Secondary electron imaging in a gas or water vapor to least 3.5 nm
  • Imaging of wet samples with no dehydration
  • Observation of the sample in its natural environment
  • No sample preparation required even for insulating samples
  • X-ray analysis on non-conductive samples
  • Observation of dynamic experiments at high temperatures in a gas environment.
  • Digital imagingreduce time-to-market and time-to-profit

Applications

  • Energy dispersive spectroscopy (EDS) with full xray mapping

Specifications

    Resolution: 3.5 nm @ 30 kV High, low and ESEM vacuum mode
    15 nm @ 3 kV Low vacuum mode
    Magnification 1,000,000x High and low vacuum mode
    Accelerating Voltage: 200 V to 30 kV  
    Stage Movement X, Y, and Z = 50 mm  

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