Center for Advanced Life Cycle Engineering

Building 89, Room 1103 
University of Maryland 
College Park, MD 20742 
301-405-5323 
301-314-9269 (fax) 
webmaster@calce.umd.edu

Environmental SEM

Introduction to the Quanta FEG ESEM 200 (Environmental Scanning Electron Microscope)

    The uniqueness of the Environmental SEM is that it allows the user to take unprepared and/or non-conductive samples, vary the environment through a range of pressures, temperatures and gas-compositions, and still be able to perform high resolution imaging and elemental analysis.

Capabilities

  • Secondary electron imaging in a gas or water vapor to least 3.5 nm
  • Imaging of wet samples with no dehydration
  • Observation of the sample in its natural environment
  • No sample preparation required even for insulating samples
  • X-ray analysis on non-conductive samples
  • Observation of dynamic experiments at high temperatures in a gas environment.
  • Digital imagingreduce time-to-market and time-to-profit

Applications

  • Sample Heating [amb. to +400oC - resistive heater]
  • Sample Cooling - wet [+/- 20oC from amb.]
  • Sample Exposure ĘC 0 to 98% Relative Humidity
  • Sample Exposure - Different gases
  • MicroInjection onto sample - liquids and gases
  • Energy dispersive spectroscopy (EDS) with full xray mapping
  • Mechanical testing

Specifications

    Resolution: 3.5 nm @ 30 kV High, low and ESEM vacuum mode
    15 nm @ 3 kV Low vacuum mode
    Magnification 7x ĘC 1,000,000x High and low vacuum mode
    Accelerating Voltage: 200 V to 30 kV  
    Stage Movement X, Y, and Z = 50 mm  

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