Center for Advanced Life Cycle Engineering

Building 89, Room 1103 
University of Maryland 
College Park, MD 20742 
301-314-9269 (fax)

Environmental SEM

Introduction to the Quanta FEG ESEM 200 (Environmental Scanning Electron Microscope)

    The uniqueness of the Environmental SEM is that it allows the user to take unprepared and/or non-conductive samples, vary the environment through a range of pressures, temperatures and gas-compositions, and still be able to perform high resolution imaging and elemental analysis.


  • Secondary electron imaging in a gas or water vapor to least 3.5 nm
  • Imaging of wet samples with no dehydration
  • Observation of the sample in its natural environment
  • No sample preparation required even for insulating samples
  • X-ray analysis on non-conductive samples
  • Observation of dynamic experiments at high temperatures in a gas environment.
  • Digital imagingreduce time-to-market and time-to-profit


  • Sample Heating [amb. to +400oC - resistive heater]
  • Sample Cooling - wet [+/- 20oC from amb.]
  • Sample Exposure ĘC 0 to 98% Relative Humidity
  • Sample Exposure - Different gases
  • MicroInjection onto sample - liquids and gases
  • Energy dispersive spectroscopy (EDS) with full xray mapping
  • Mechanical testing


    Resolution: 3.5 nm @ 30 kV High, low and ESEM vacuum mode
    15 nm @ 3 kV Low vacuum mode
    Magnification 7x ĘC 1,000,000x High and low vacuum mode
    Accelerating Voltage: 200 V to 30 kV  
    Stage Movement X, Y, and Z = 50 mm  

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